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Fabian T Goericke
Fabian T Goericke
Atomic Machines
Verified email at atomicmachines.com
Title
Cited by
Cited by
Year
The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing
A Loui, FT Goericke, TV Ratto, J Lee, BR Hart, WP King
Sensors and Actuators A: Physical 147 (2), 516-521, 2008
862008
Modeling piezoresistive microcantilever sensor response to surface stress for biochemical sensors
FT Goericke, WP King
IEEE Sensors Journal 8 (8), 1404-1410, 2008
592008
Pyroelectric aluminum nitride micro electromechanical systems infrared sensor with wavelength-selective infrared absorber
K Yamamoto, F Goericke, A Guedes, G Jaramillo, T Hada, AP Pisano, ...
Applied Physics Letters 104 (11), 2014
412014
Microleverage DETF aluminum nitride resonating accelerometer
G Vigevani, FT Goericke, AP Pisano, II Izyumin, BE Boser
2012 IEEE International Frequency Control Symposium Proceedings, 1-4, 2012
342012
Microcantilever heater-thermometer with integrated temperature-compensated strain sensor
WP King, J Lee, FT Goericke
US Patent 7,928,343, 2011
302011
Microcantilever hotplates with temperature-compensated piezoresistive strain sensors
F Goericke, J Lee, WP King
Sensors and Actuators A: Physical 143 (2), 181-190, 2008
292008
Temperature-dependent thermomechanical noise spectra of doped silicon microcantilevers
J Lee, F Goericke, WP King
Sensors and Actuators A: Physical 145, 37-43, 2008
272008
Advanced temperature compensation for piezoresistive sensors based on crystallographic orientation
BW Chui, L Aeschimann, T Akiyama, U Staufer, NF De Rooij, J Lee, ...
Review of scientific instruments 78 (4), 2007
242007
High temperature compatible aluminum nitride resonating strain sensor
FT Goericke, MW Chan, G Vigevani, I Izyumin, BE Boser, AP Pisano
2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011
202011
Novel thin-film piezoelectric aluminum nitride rate gyroscope
FT Goericke, G Vigevani, II Izyumin, BE Boser, AP Pisano
2012 IEEE International Ultrasonics Symposium, 1067-1070, 2012
172012
Electrode design and coupling optimization of Aluminum Nitride DETF
G Vigevani, FT Goericke, II Izyumin, BE Boser, AP Pisano
2011 IEEE International Ultrasonics Symposium, 1731-1734, 2011
102011
Experimentally validated aluminum nitride based pressure, temperature and 3-axis acceleration sensors integrated on a single chip
F Goericke, K Mansukhani, K Yamamoto, A Pisano
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014
92014
Piezoresistive scanning probe arrays for operation in liquids
L Aeschimann, F Goericke, J Polesel-Maris, A Meister, T Akiyama, B Chui, ...
Journal of Physics: Conference Series 61 (1), 6, 2007
82007
Piezoelectric micromachined ultrasonic transducers for range-finding applications
DA Horsley, RJ Przybyla, SE Shelton, FT Goericke, BE Eovino, M Alex, ...
2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 1-3, 2021
62021
Bent-beam sensing with triple-beam tuning forks
FT Goericke, G Vigevani, AP Pisano
Applied Physics Letters 102 (25), 2013
62013
Untitled
5*
Aluminum nitride sensors for harsh environments
FT Goericke
Ph. D. Thesis, 2013
42013
Method for tuning the resonant frequency of a piezoelectric micromachined ultrasonic transducer
F Goericke, S Shelton, B Costello
US Patent 11,938,515, 2024
22024
Multi-cavity package for ultrasonic transducer acoustic mode control
S Shelton, F Goericke
US Patent App. 16/872,712, 2020
22020
Aluminum nitride high temperature strain sensors
FT Goericke, AP Pisano
Structural Health Monitoring 2013, 2013
12013
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