| Comb-drive actuators for large displacements R Legtenberg, AW Groeneveld, M Elwenspoek Journal of Micromechanics and microengineering 6 (3), 320, 1996 | 804 | 1996 |
| Stiction in surface micromachining N Tas, T Sonnenberg, H Jansen, R Legtenberg, M Elwenspoek Journal of Micromechanics and Microengineering 6 (4), 385, 1996 | 757 | 1996 |
| The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control H Jansen, M de Boer, R Legtenberg, M Elwenspoek Journal of Micromechanics and Microengineering 5 (2), 115, 1995 | 738 | 1995 |
| A survey on the reactive ion etching of silicon in microtechnology H Jansen, H Gardeniers, M de Boer, M Elwenspoek, J Fluitman Journal of micromechanics and microengineering 6 (1), 14, 1996 | 667 | 1996 |
| Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry FR Blom, S Bouwstra, M Elwenspoek, JHJ Fluitman Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1992 | 598 | 1992 |
| Silicon micromachining M Elwenspoek, M Elwenspoek, HV Jansen Cambridge university press, 2004 | 590 | 2004 |
| Mechanical microsensors M Elwenspoek, RJ Wiegerink Springer Science & Business Media, 2001 | 569 | 2001 |
| A practical guide for the fabrication of microfluidic devices using glass and silicon C Iliescu, H Taylor, M Avram, J Miao, S Franssila Biomicrofluidics 6 (1), 2012 | 431 | 2012 |
| A thermopneumatic micropump based on micro-engineering techniques FCM Van de Pol, HTG Van Lintel, M Elwenspoek, JHJ Fluitman Sensors and Actuators A: Physical 21 (1-3), 198-202, 1990 | 389 | 1990 |
| Electrostatic curved electrode actuators R Legtenberg, J Gilbert, SD Senturia, M Elwenspoek Journal of Microelectromechanical Systems 6 (3), 257-265, 1997 | 368 | 1997 |
| Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as … HV Jansen, MJ De Boer, S Unnikrishnan, MC Louwerse, MC Elwenspoek Journal of micromechanics and microengineering 19 (3), 033001, 2009 | 361 | 2009 |
| Micro resonant force gauges HAC Tilmans, M Elwenspoek, JHJ Fluitman Sensors and Actuators A: Physical 30 (1-2), 35-53, 1992 | 354 | 1992 |
| Capillary filling speed of water in nanochannels NR Tas, J Haneveld, HV Jansen, M Elwenspoek, A van den Berg Applied Physics Letters 85 (15), 3274-3276, 2004 | 330 | 2004 |
| Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms R Legtenberg, HAC Tilmans, J Elders, M Elwenspoek Sensors and actuators A: Physical 43 (1-3), 230-238, 1994 | 321 | 1994 |
| Silicon nitride nanosieve membrane HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, ... Nano letters 4 (2), 283-287, 2004 | 315 | 2004 |
| The μ-flown: a novel device for measuring acoustic flows HE de Bree, P Leussink, T Korthorst, H Jansen, TSJ Lammerink, ... Sensors and actuators A: Physical 54 (1-3), 552-557, 1996 | 314* | 1996 |
| Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures MJ De Boer, JGE Gardeniers, HV Jansen, E Smulders, MJ Gilde, ... Journal of microelectromechanical systems 11 (4), 385-401, 2002 | 313 | 2002 |
| Micromachining of buried micro channels in silicon MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ... Journal of Microelectromechanical systems 9 (1), 94-103, 2000 | 313 | 2000 |
| Micro-liquid flow sensor TSJ Lammerink, NR Tas, M Elwenspoek, JHJ Fluitman Sensors and actuators A: Physical 37, 45-50, 1993 | 280 | 1993 |
| Anisotropic reactive ion etching of silicon using SF 6/O 2/CHF 3 gas mixtures R Legtenberg, H Jansen, M de Boer, M Elwenspoek Journal of the electrochemical society 142 (6), 2020, 1995 | 270 | 1995 |
H.V. Jansen (Henri)Associate Professor, Universiteit TwenteVerified email at utwente.nl
