| Short period La/B and LaN/B multilayer mirrors for~ 6.8 nm wavelength IA Makhotkin, E Zoethout, R van de Kruijs, SN Yakunin, E Louis, ... Optics Express 21 (24), 29894-29904, 2013 | 64 | 2013 |
| Combined EUV reflectance and X-ray reflectivity data analysis of periodic multilayer structures SN Yakunin, IA Makhotkin, KV Nikolaev, RWE Van De Kruijs, MA Chuev, ... Optics express 22 (17), 20076-20086, 2014 | 50 | 2014 |
| Spectral properties of La/B-based multilayer mirrors near the boron K absorption edge IA Makhotkin, E Zoethout, E Louis, AM Yakunin, S Müllender, F Bijkerk Optics express 20 (11), 11778-11786, 2012 | 38 | 2012 |
| Reconstruction of interfaces of periodic multilayers from X-ray reflectivity using a free-form approach A Zameshin, IA Makhotkin, SN Yakunin, RWE van de Kruijs, AE Yakshin, ... Journal of Applied Crystallography 49 (4), 1300-1307, 2016 | 31 | 2016 |
| Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures RV Medvedev, KV Nikolaev, AA Zameshin, D IJpes, IA Makhotkin, ... Journal of Applied Physics 126 (4), 2019 | 26 | 2019 |
| Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser I Milov, IA Makhotkin, R Sobierajski, N Medvedev, V Lipp, J Chalupský, ... Optics express 26 (15), 19665-19685, 2018 | 24 | 2018 |
| Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate R Sobierajski, I Jacyna, P Dłużewski, MT Klepka, D Klinger, JB Pełka, ... Optics express 24 (14), 15468-15477, 2016 | 24 | 2016 |
| Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation I Milov, V Zhakhovsky, D Ilnitsky, K Migdal, V Khokhlov, Y Petrov, ... Applied surface science 528, 146952, 2020 | 23 | 2020 |
| Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold IA Makhotkin, R Sobierajski, J Chalupský, K Tiedtke, G de Vries, ... Journal of synchrotron radiation 25 (1), 77-84, 2018 | 23 | 2018 |
| Wavelength selection for multilayer coatings for lithography generation beyond extreme ultraviolet IA Makhotkin, E Zoethout, E Louis, AM Yakunin, S Müllender, F Bijkerk Journal of Micro/Nanolithography, MEMS, and MOEMS 11 (4), 040501-040501, 2012 | 22 | 2012 |
| Similarity in ruthenium damage induced by photons with different energies: From visible light to hard X-rays I Milov, V Lipp, D Ilnitsky, N Medvedev, K Migdal, V Zhakhovsky, ... Applied surface science 501, 143973, 2020 | 19 | 2020 |
| Effect of atomic-temperature dependence of the electron–phonon coupling in two-temperature model F Akhmetov, N Medvedev, I Makhotkin, M Ackermann, I Milov Materials 15 (15), 5193, 2022 | 12 | 2022 |
| Refined extreme ultraviolet mask stack model IA Makhotkin, M Wu, V Soltwisch, F Scholze, V Philipsen JOSA A 38 (4), 498-503, 2021 | 12 | 2021 |
| Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers KV Nikolaev, SN Yakunin, IA Makhotkin, J Rie, RV Medvedev, ... Acta Crystallographica Section A: Foundations and Advances 75 (2), 342-351, 2019 | 12 | 2019 |
| Influence of noble gas ion polishing species on extreme ultraviolet mirrors AJR van den Boogaard, E Zoethout, IA Makhotkin, E Louis, F Bijkerk Journal of Applied Physics 112 (12), 2012 | 12 | 2012 |
| A semi-analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence KV Nikolaev, V Soltwisch, P Hönicke, F Scholze, J de La Rie, SN Yakunin, ... Journal of synchrotron radiation 27 (2), 386-395, 2020 | 11 | 2020 |
| Diffusion-induced structural changes in La/B-based multilayers for 6.7-nm radiation SL Nyabero, RWE van de Kruijs, AE Yakshin, IA Makhotkin, J Bosgra, ... Journal of Micro/Nanolithography, MEMS, and MOEMS 13 (1), 013014-013014, 2014 | 11 | 2014 |
| Determination of preferential molecular orientation in porphyrin-fullerene dyad ZnDHD6ee monolayers by the X-ray standing-wave method and X-ray reflectometry AY Seregin, YA D’yakova, SN Yakunin, IA Makhotkin, AS Alekseev, ... Crystallography reports 58, 934-938, 2013 | 10 | 2013 |
| Determination of the density of ultrathin La films in La/B4C layered structures using X‐ray standing waves IA Makhotkin, E Louis, RWE van de Kruijs, AE Yakshin, E Zoethout, ... physica status solidi (a) 208 (11), 2597-2600, 2011 | 10 | 2011 |
| Characterization of megahertz X-ray laser beams by multishot desorption imprints in PMMA V Vozda, T Burian, V Hájková, L Juha, H Enkisch, B Faatz, M Hermann, ... Optics express 28 (18), 25664-25681, 2020 | 8 | 2020 |
Igor MilovASMLVerified email at asml.com
