Eric Chason
Eric Chason
Bestätigte E-Mail-Adresse bei
Zitiert von
Zitiert von
Making waves: kinetic processes controlling surface evolution during low energy ion sputtering
WL Chan, E Chason
Journal of applied physics 101 (12), 2007
Stress in thin films and coatings: Current status, challenges, and prospects
G Abadias, E Chason, J Keckes, M Sebastiani, GB Thompson, E Barthel, ...
Journal of Vacuum Science & Technology A 36 (2), 2018
Origin of compressive residual stress in polycrystalline thin films
E Chason, BW Sheldon, LB Freund, JA Floro, SJ Hearne
Physical Review Letters 88 (15), 156103, 2002
Roughening instability and evolution of the Ge (001) surface during ion sputtering
E Chason, TM Mayer, BK Kellerman, DT McIlroy, AJ Howard
Physical review letters 72 (19), 3040, 1994
The dynamic competition between stress generation and relaxation mechanisms during coalescence of Volmer–Weber thin films
JA Floro, SJ Hearne, JA Hunter, P Kotula, E Chason, SC Seel, ...
Journal of Applied Physics 89 (9), 4886-4897, 2001
Spontaneous pattern formation on ion bombarded Si (001)
J Erlebacher, MJ Aziz, E Chason, MB Sinclair, JA Floro
Physical review letters 82 (11), 2330, 1999
Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations
LB Freund, JA Floro, E Chason
Applied Physics Letters 74 (14), 1987-1989, 1999
Roughening instability and ion‐induced viscous relaxation of SiO2 surfaces
TM Mayer, E Chason, AJ Howard
Journal of applied physics 76 (3), 1633-1643, 1994
Physical origins of intrinsic stresses in Volmer–Weber thin films
JA Floro, E Chason, RC Cammarata, DJ Srolovitz
MRS bulletin 27 (1), 19-25, 2002
Ion beams in silicon processing and characterization
E Chason, ST Picraux, JM Poate, JO Borland, MI Current, ...
Journal of applied physics 81 (10), 6513-6561, 1997
Thin film and surface characterization by specular X-ray reflectivity
E Chason, TM Mayer
Critical Reviews in Solid State and Material Sciences 22 (1), 1-67, 1997
Stress evolution during metalorganic chemical vapor deposition of GaN
S Hearne, E Chason, J Han, JA Floro, J Figiel, J Hunter, H Amano, ...
Applied Physics Letters 74 (3), 356-358, 1999
Model for stress generated upon contact of neighboring islands on the surface of a substrate
LB Freund, E Chason
Journal of Applied Physics 89 (9), 4866-4873, 2001
Stress and defect control in GaN using low temperature interlayers
H Amano, M Iwaya, T Kashima, M Katsuragawa, I Akasaki, J Han, ...
Japanese journal of applied physics 37 (12B), L1540, 1998
SiGe island shape transitions induced by elastic repulsion
JA Floro, GA Lucadamo, E Chason, LB Freund, M Sinclair, RD Twesten, ...
Physical review letters 80 (21), 4717, 1998
Evolution of coherent islands in Si 1− x Ge x/Si (001)
JA Floro, E Chason, LB Freund, RD Twesten, RQ Hwang, GA Lucadamo
Physical Review B 59 (3), 1990, 1999
Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models
E Chason, PR Guduru
Journal of Applied Physics 119 (19), 2016
SiGe coherent islanding and stress relaxation in the high mobility regime
JA Floro, E Chason, RD Twesten, RQ Hwang, LB Freund
Physical review letters 79 (20), 3946, 1997
Real-time stress evolution during Si1-xGex Heteroepitaxy: Dislocations, islanding, and segregation
JA Floro, E Chason, SR Lee, RD Twesten, RQ Hwang, LB Freund
Journal of Electronic Materials 26, 969-979, 1997
Stress and microstructure evolution in thick sputtered films
AJ Detor, AM Hodge, E Chason, Y Wang, H Xu, M Conyers, A Nikroo, ...
Acta materialia 57 (7), 2055-2065, 2009
Das System kann den Vorgang jetzt nicht ausführen. Versuchen Sie es später erneut.
Artikel 1–20