| Making waves: kinetic processes controlling surface evolution during low energy ion sputtering WL Chan, E Chason Journal of applied physics 101 (12), 2007 | 573 | 2007 |
| Stress in thin films and coatings: Current status, challenges, and prospects G Abadias, E Chason, J Keckes, M Sebastiani, GB Thompson, E Barthel, ... Journal of Vacuum Science & Technology A 36 (2), 2018 | 563 | 2018 |
| Origin of compressive residual stress in polycrystalline thin films E Chason, BW Sheldon, LB Freund, JA Floro, SJ Hearne Physical Review Letters 88 (15), 156103, 2002 | 547 | 2002 |
| Roughening instability and evolution of the Ge (001) surface during ion sputtering E Chason, TM Mayer, BK Kellerman, DT McIlroy, AJ Howard Physical review letters 72 (19), 3040, 1994 | 443 | 1994 |
| The dynamic competition between stress generation and relaxation mechanisms during coalescence of Volmer–Weber thin films JA Floro, SJ Hearne, JA Hunter, P Kotula, E Chason, SC Seel, ... Journal of Applied Physics 89 (9), 4886-4897, 2001 | 432 | 2001 |
| Spontaneous pattern formation on ion bombarded Si (001) J Erlebacher, MJ Aziz, E Chason, MB Sinclair, JA Floro Physical review letters 82 (11), 2330, 1999 | 394 | 1999 |
| Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations LB Freund, JA Floro, E Chason Applied Physics Letters 74 (14), 1987-1989, 1999 | 385 | 1999 |
| Roughening instability and ion‐induced viscous relaxation of SiO2 surfaces TM Mayer, E Chason, AJ Howard Journal of applied physics 76 (3), 1633-1643, 1994 | 366 | 1994 |
| Physical origins of intrinsic stresses in Volmer–Weber thin films JA Floro, E Chason, RC Cammarata, DJ Srolovitz MRS bulletin 27 (1), 19-25, 2002 | 361 | 2002 |
| Ion beams in silicon processing and characterization E Chason, ST Picraux, JM Poate, JO Borland, MI Current, ... Journal of applied physics 81 (10), 6513-6561, 1997 | 355 | 1997 |
| Thin film and surface characterization by specular X-ray reflectivity E Chason, TM Mayer Critical Reviews in Solid State and Material Sciences 22 (1), 1-67, 1997 | 331 | 1997 |
| Stress evolution during metalorganic chemical vapor deposition of GaN S Hearne, E Chason, J Han, JA Floro, J Figiel, J Hunter, H Amano, ... Applied Physics Letters 74 (3), 356-358, 1999 | 301 | 1999 |
| Model for stress generated upon contact of neighboring islands on the surface of a substrate LB Freund, E Chason Journal of Applied Physics 89 (9), 4866-4873, 2001 | 255 | 2001 |
| Stress and defect control in GaN using low temperature interlayers H Amano, M Iwaya, T Kashima, M Katsuragawa, I Akasaki, J Han, ... Japanese journal of applied physics 37 (12B), L1540, 1998 | 228 | 1998 |
| SiGe island shape transitions induced by elastic repulsion JA Floro, GA Lucadamo, E Chason, LB Freund, M Sinclair, RD Twesten, ... Physical review letters 80 (21), 4717, 1998 | 216 | 1998 |
| Evolution of coherent islands in Si 1− x Ge x/Si (001) JA Floro, E Chason, LB Freund, RD Twesten, RQ Hwang, GA Lucadamo Physical Review B 59 (3), 1990, 1999 | 215 | 1999 |
| Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models E Chason, PR Guduru Journal of Applied Physics 119 (19), 2016 | 207 | 2016 |
| SiGe coherent islanding and stress relaxation in the high mobility regime JA Floro, E Chason, RD Twesten, RQ Hwang, LB Freund Physical review letters 79 (20), 3946, 1997 | 194 | 1997 |
| Real-time stress evolution during Si1-xGex Heteroepitaxy: Dislocations, islanding, and segregation JA Floro, E Chason, SR Lee, RD Twesten, RQ Hwang, LB Freund Journal of Electronic Materials 26, 969-979, 1997 | 187 | 1997 |
| Stress and microstructure evolution in thick sputtered films AJ Detor, AM Hodge, E Chason, Y Wang, H Xu, M Conyers, A Nikroo, ... Acta materialia 57 (7), 2055-2065, 2009 | 166 | 2009 |
