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Saskia Biehl
Saskia Biehl
Dr. des Maschinenbaus
Bestätigte E-Mail-Adresse bei lbf.fraunhofer.de - Startseite
Titel
Zitiert von
Zitiert von
Jahr
Refractive microlens fabrication by ink-jet process
S Biehl, R Danzebrink, P Oliveira, MA Aegerter
Journal of Sol-Gel Science and Technology 13, 177-182, 1998
981998
Micro force sensor with piezoresistive amorphous carbon strain gauge
E Peiner, A Tibrewala, R Bandorf, S Biehl, H Lüthje, L Doering
Sensors and actuators A: Physical 130, 75-82, 2006
912006
Transport and optical properties of amorphous carbon and hydrogenated amorphous carbon films
A Tibrewala, E Peiner, R Bandorf, S Biehl, H Lüthje
Applied surface science 252 (15), 5387-5390, 2006
772006
Multifunctional thin film sensors based on amorphous diamond-like carbon for use in tribological applications
S Biehl, H Lüthje, R Bandorf, JH Sick
Thin solid films 515 (3), 1171-1175, 2006
522006
Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films
A Tibrewala, E Peiner, R Bandorf, S Biehl, H Lüthje
Thin Solid Films 515 (20-21), 8028-8033, 2007
422007
Piezoresistive gauge factor of hydrogenated amorphous carbon films
A Tibrewala, E Peiner, R Bandorf, S Biehl, H Lüthje
Journal of micromechanics and microengineering 16 (6), S75, 2006
362006
Thin film sensor for wear detection of cutting tools
H Lüthje, R Bandorf, S Biehl, B Stint
Sensors and Actuators A: Physical 116 (1), 133-136, 2004
352004
The piezoresistive effect in diamond-like carbon films
A Tibrewala, E Peiner, R Bandorf, S Biehl, H Lüthje
Journal of micromechanics and microengineering 17 (7), S77, 2007
342007
Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems
S Biehl, S Staufenbiel, F Hauschild, A Albert
Microsystem Technologies 16, 879-883, 2010
252010
Multifunctional thin film sensor system as monitoring system in production
S Biehl, C Rumposch, N Paetsch, G Bräuer, D Weise, P Scholz, ...
Microsystem Technologies 22, 1757-1765, 2016
222016
Preparation and characterization of multifunctional thin film sensors based on amorphous diamond-like-carbon
H Luthje, S Biehl, R Bandorf, JH Sick, E Peiner, A Tibrewala
The 13th International Conference on Solid-State Sensors, Actuators and …, 2005
182005
Thin film sensors for condition monitoring in ball screw drives
S Biehl, S Staufenbiel, S Recknagel, B Denkena, O Bertram
1st Joint International Symposium on System-Integrated Intelligence, 27-29, 2012
162012
Bearing device having a sensor for measuring the vertical bearing force of a rotating shaft
S Biehl, B Lüneburg
US Patent 8,869,633, 2014
112014
Development of a novel piezoresistive thin film sensor system based on hydrogenated carbon
S Biehl, C Rumposch, G Bräuer, HW Hoffmeister, M Luig
Microsystem technologies 20, 989-993, 2014
112014
Force-sensing device for measuring force on solid state actuators, method for measuring force, as well as use of force-sensing device
H Luthje, S Biehl, D Mayer, T Melz, S Herold
US Patent App. 12/298,035, 2012
112012
Control device for non-positive connections
H Lüthje, S Biehl, R Bandorf
US Patent 7,350,419, 2008
92008
Wear-resistive thin-film sensors on cutting tools for in-process temperature measurement
M Plogmeyer, G González, S Biehl, V Schulze, G Bräuer
Procedia CIRP 101, 85-88, 2021
82021
Smart coatings for intelligent surfaces
G Bräuer, R Bandorf, S Biehl, A Dietz, H Lüthje, M Vergöhl
Vakuum in Forschung und Praxis 20 (S1 1), 34-37, 2008
72008
Laser-patterning of thin films deposited on complex surfaces for the fabrication of micro-sensors
S Biehl, H Lüthje
72004
Effect of tool coatings on surface grain refinement in orthogonal cutting of AISI 4140 steel
G González, M Plogmeyer, F Zanger, S Biehl, G Bräuer, V Schulze
Procedia CIRP 87, 176-180, 2020
62020
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