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Anosh Daruwalla
Anosh Daruwalla
Senior MEMS Engineer
Bestätigte E-Mail-Adresse bei stathera.com
Titel
Zitiert von
Zitiert von
Jahr
Crossole: A Gestural Interface for Composition, Improvisation and Performance using Kinect.
S Sentürk, SW Lee, A Sastry, A Daruwalla, G Weinberg
NIME, 2012
482012
Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units
H Wen, A Daruwalla, F Ayazi
Microsystems & nanoengineering 3 (1), 1-9, 2017
352017
Monocrystalline silicon carbide disk resonators on phononic crystals with ultra-low dissipation bulk acoustic wave modes
B Hamelin, J Yang, A Daruwalla, H Wen, F Ayazi
Scientific reports 9 (1), 18698, 2019
332019
Cascaded collimator for atomic beams traveling in planar silicon devices
C Li, X Chai, B Wei, J Yang, A Daruwalla, F Ayazi, C Raman
Nature communications 10 (1), 1831, 2019
232019
Wafer-level-packaged HARPSS+ MEMS platform: Integration of robust timing and inertial measurement units (TIMU) on a single chip
H Wen, A Daruwalla, Y Jeong, P Gupta, J Choi, CS Liu, F Ayazi
2018 IEEE/ION position, location and navigation symposium (PLANS), 261-266, 2018
232018
A high-frequency resonant framed-annulus pitch or roll gyroscope for robust high-performance single-chip inertial measurement units
H Wen, A Daruwalla, CS Liu, F Ayazi
Journal of Microelectromechanical Systems 27 (6), 995-1008, 2018
202018
A high-performance single-chip timing and inertial measurement unit with robust mode-matched gyroscopes
H Wen, A Daruwalla, Y Jeong, P Gupta, J Choi, C Liu, F Ayazi
2018 IEEE Micro Electro Mechanical Systems (MEMS), 105-108, 2018
202018
A Hermetically-Sealed 2.9MHz Disk BAW Gyroscope with Sub-Degree-Per-Hour Bias Instability
H Wen, A Daruwalla, CS Liu, F Ayazi
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020
192020
Precision high-bandwidth out-of-plane accelerometer as contact microphone for body-worn auscultation devices
P Gupta, Y Jeong, J Choi, M Faingold, F Ayazi
2018 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head …, 2018
192018
An out-of-plane" hinge-shaped" nano-gap accelerometer with high sensitivity and wide bandwidth
Y Jeong, A Daruwalla, H Wen, F Ayazi
2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017
192017
Low motional impedance distributed lamé mode resonators for high frequency timing applications
A Daruwalla, H Wen, CS Liu, F Ayazi
Microsystems & Nanoengineering 6 (1), 53, 2020
162020
A study of mode-matching and alignment in piezoelectric disk resonator gyros via femtosecond laser ablation
Z Liu, A Daruwalla, B Hamelin, F Ayazi
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021
152021
High-Q energy trapping of temperature-stable shear waves with Lamé cross-sectional polarization in a single crystal silicon waveguide
R Tabrizian, A Daruwalla, F Ayazi
Applied Physics Letters 108 (11), 2016
152016
HARPSS-fabricated nano-gap comb-drive for efficient linear actuation of high frequency BAW resonators
H Wen, A Daruwalla, R Mirjalili, F Ayazi
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016
122016
Epitaxially-grown thick polysilicon for baw disk resonator gyroscopes with very low dissipation
A Daruwalla, H Wen, R Mirjalili, F Ayazi
2018 IEEE Micro Electro Mechanical Systems (MEMS), 1008-1011, 2018
112018
Distributed Lamé mode resonators for temperature-stable high frequency mems oscillators
A Daruwalla, CS Liu, H Wen, F Ayazi
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017
102017
High-aspect-ratio sub-micron trench etching on SOI using wet metal-assisted chemical etching (MaCE) process
B Hamelin, L Li, A Daruwalla, CP Wong, F Ayazi
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016
102016
A piezoelectric resonant accelerometer for above 140db linear dynamic range high-G applications
S Shin, A Daruwalla, M Gong, H Wen, F Ayazi
2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019
92019
High-G and high-bandwidth bulk acoustic wave (BAW) accelerometers using a metal-less AlN-HARPSS process with 95 nm gaps
A Daruwalla, H Wen, M Gong, F Ayazi
IEEE Sensors Letters 4 (8), 1-4, 2020
82020
A piezo-capacitive BAW accelerometer with extended dynamic range using a gap-changing moving electrode
A Daruwalla, H Wen, CS Liu, H Jeong, F Ayazi
2018 IEEE/ION Position, Location and Navigation Symposium (PLANS), 283-287, 2018
82018
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