| Electrical and thermal conduction in atomic layer deposition nanobridges down to 7 nm thickness S Yoneoka, J Lee, M Liger, G Yama, T Kodama, M Gunji, J Provine, ... Nano letters 12 (2), 683-686, 2012 | 92 | 2012 |
| Stable operation of MEMS oscillators far above the critical vibration amplitude in the nonlinear regime HK Lee, R Melamud, S Chandorkar, J Salvia, S Yoneoka, TW Kenny Journal of microelectromechanical systems 20 (6), 1228-1230, 2011 | 62 | 2011 |
| Closed-loop control of linear resonant actuator using back EMF and inertial compensation H Vasudevan, EA Mazzochette, A Hajati, S Yoneoka US Patent 10,601,355, 2020 | 51 | 2020 |
| ALD-metal uncooled bolometer S Yoneoka, M Liger, G Yama, R Schuster, F Purkl, J Provine, FB Prinz, ... 2011 IEEE 24th international conference on micro electro mechanical systems …, 2011 | 46 | 2011 |
| A method for wafer-scale encapsulation of large lateral deflection MEMS devices AB Graham, MW Messana, PG Hartwell, J Provine, S Yoneoka, ... Journal of microelectromechanical systems 19 (1), 28-37, 2009 | 42 | 2009 |
| Hermeticity and diffusion investigation in polysilicon film encapsulation for microelectromechanical systems B Kim, RN Candler, R Melamud, MA Hopcroft, S Yoneoka, HK Lee, ... Journal of applied physics 105 (1), 2009 | 42 | 2009 |
| Method to package multiple mems sensors and actuators at different gases and cavity pressures W Zhang, S Yoneoka US Patent App. 14/102,465, 2014 | 39 | 2014 |
| Fatigue experiments on single crystal silicon in an oxygen-free environment VA Hong, S Yoneoka, MW Messana, AB Graham, JC Salvia, ... Journal of Microelectromechanical Systems 24 (2), 351-359, 2014 | 35 | 2014 |
| The long path from MEMS resonators to timing products E Ng, Y Yang, VA Hong, CH Ahn, DB Heinz, I Flader, Y Chen, ... 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 34 | 2015 |
| Characterization of encapsulated micromechanical resonators sealed and coated with polycrystalline SiC S Yoneoka, CS Roper, RN Candler, SA Chandorkar, AB Graham, ... Journal of Microelectromechanical Systems 19 (2), 357-366, 2010 | 32 | 2010 |
| Gap sensor for haptic feedback assembly S Yoneoka, CC Lam, SJ McEuen, PJ Augenbergs US Patent 10,185,397, 2019 | 25 | 2019 |
| High-cyclic fatigue experiments of single crystal silicon in an oxygen-free environment S Yoneoka, YQ Qu, S Wang, MW Messana, AB Graham, J Salvia, B Kim, ... 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010 | 23 | 2010 |
| Method and structure of an integrated MEMS inertial sensor device using electrostatic quadrature-cancellation S Yoneoka, S Sridharamurthy, W Zhang, THT Lee US Patent 9,075,079, 2015 | 22 | 2015 |
| Packaging of large lateral deflection MEMS using a combination of fusion bonding and epitaxial reactor sealing MW Messana, AB Graham, S Yoneoka, RT Howe, TW Kenny Proc. Solid-State Sens. Actuators Workshop, 336-339, 2010 | 21 | 2010 |
| Observations of fixed and mobile charge in composite MEMS resonators G Bahl, R Melamud, B Kim, S Chandorkar, J Salvia, MA Hopcroft, ... Solid-State Sensors, Actuators, and Microsystems Workshop, 102-105, 2008 | 19 | 2008 |
| Multi-axis integrated MEMS inertial sensing device on single packaged chip T Lee, W Zhang, S Sridharamurthy, S Yoneoka US Patent 10,132,630, 2018 | 18 | 2018 |
| MEMS structure with improved shielding and method SS Sridharamurthy, S Yoneoka, W Zhang US Patent 10,046,964, 2018 | 17 | 2018 |
| Stable oscillation of MEMS resonators beyond the critical bifurcation point HK Lee, JC Salvia, S Yoneoka, G Bahl, YQ Qu, R Melamud, ... Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head …, 2010 | 16 | 2010 |
| MEMS-based dual and single proof-mass accelerometer methods and apparatus D van Der Heide, S Yoneoka US Patent 9,246,017, 2016 | 15 | 2016 |
| Multi-axis MEMS rate sensor device W Zhang, S Sridharamurthy, S Yoneoka, T Lee US Patent 10,036,635, 2018 | 14 | 2018 |
