| Deposition and patterning of diamondlike carbon as antiwear nanoimprint templates S Ramachandran, L Tao, TH Lee, S Sant, LJ Overzet, MJ Goeckner, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2006 | 49 | 2006 |
| Durable diamond-like carbon templates for UV nanoimprint lithography L Tao, S Ramachandran, CT Nelson, M Lin, LJ Overzet, M Goeckner, ... Nanotechnology 19 (10), 105302, 2008 | 34 | 2008 |
| Forming carbon nanotube composites by directly coating forests with inorganic materials using low pressure chemical vapor deposition A Chandrashekar, S Ramachandran, G Pollack, JS Lee, GS Lee, ... Thin solid films 517 (2), 525-530, 2008 | 31 | 2008 |
| Method and apparatus of halogen removal H Singh, S Sant, SI Chou, V Vahedi, R Casaes, S Ramachandran US Patent 8,525,139, 2013 | 21 | 2013 |
| Filling structures of high aspect ratio elements for growth amplification and device fabrication LJ Overzet, GS Lee, A Chandrashekar, S Ramachandran, JS Lee, ... US Patent App. 11/391,016, 2010 | 5 | 2010 |
| Study and optimization of PECVD films containing fluorine and carbon layered with diamond like carbon films as ultra low dielectric constant interlayer dielectrics NG Sundaram, S Ramachandran, GS Lee, L Overzet MRS Online Proceedings Library (OPL) 1511, mrsf12-1511-ee12-04, 2013 | 3 | 2013 |
| Study of layered diamond like carbon and PECVD fluorocarbon films for ultra low dielectric constant interlayer dielectric applications NG Sundaram, S Ramachandran, L Overzet, M Goeckner, GS Lee Journal of Materials Research 31 (8), 1027-1037, 2016 | 2 | 2016 |
| Study of Diamond like Carbon as template for nanoimprint lithography and as a filler material for vertically aligned carbon nanotube forests S Ramachandran Ph. D. Thesis, 2008 | 1 | 2008 |
| Filling of carbon nanotube forests grown by atmospheric pressure PECVD A Chandrashekar, S Ramachandran, GP Pollack, JS Lee, GS Lee, ... 2006 IEEE Nanotechnology Materials and Devices Conference 1, 278-279, 2006 | 1 | 2006 |
| High precision edge ring centering for substrate processing systems HL Han, S Ramachandran, M Estoque US Patent App. 17/912,990, 2023 | | 2023 |
| Mid-ring erosion compensation in substrate processing systems HL Han, S Ramachandran US Patent App. 17/913,008, 2023 | | 2023 |
| Method for conditioning a plasma processing chamber NM Wilson, N Roschewsky, S Ramachandran US Patent App. 17/911,596, 2023 | | 2023 |
| Edge ring systems for substrate processing systems HL Han, X Huang, AM Paterson, S Sriraman, A Erickson, J Wu, ... US Patent App. 17/631,984, 2022 | | 2022 |
| System, method and apparatus for RF power compensation in plasma etch chamber RG O'neill, A Sato, E Tonnis, S Ramachandran, SI Chou US Patent 9,412,670, 2016 | | 2016 |
| Comparison of gas-phase chemistry during deposition of amorphous carbon films using capacitive and inductive discharges. S Ramachandran, L Overzet, W Hu, LSN Tao, GS Lee, C Nelson, ... APS Annual Gaseous Electronics Meeting Abstracts, ET1. 006, 2007 | | 2007 |
| Papers from the 50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication-Nanoimprint Lithography-Deposition and patterning of diamondlike … S Ramachandran, L Tao, TH Lee, S Sant, LJ Overzet, MJ Goeckner, ... Journal of vacuum science & technology. B, Microelectronics and nanometer …, 2006 | | 2006 |
| Nanofabrication of Diamond-like Carbon Templates for Nanoimprint Lithography L Tao, S Ramachandran, CT Nelson, LJ Overzet, MJ Goeckner, GS Lee, ... MRS Online Proceedings Library (OPL) 956, 0956-J13-04, 2006 | | 2006 |
| Effect of Non-sinusoidal Rf Chuck Biases on Sheath Dynamics in an Electronegative Discharge S Ramachandran University of Texas at Dallas, 2005 | | 2005 |
| Sub-50 nm scratch-proof DLC molds for reversal nanoimprint lithography L Tao, CT Nelson, K Trivedi, S Ramachandran, M Goeckner, L Overzet, ... | | |
| Department of Electrical Engineering University of Texas at Dallas S Ramachandran | | |
