Phase change memory technology GW Burr, MJ Breitwisch, M Franceschini, D Garetto, K Gopalakrishnan, ...
Journal of Vacuum Science & Technology B 28 (2), 223-262, 2010
1231 2010 Novel lithography-independent pore phase change memory M Breitwisch, T Nirschl, CF Chen, Y Zhu, MH Lee, M Lamorey, GW Burr, ...
2007 IEEE Symposium on VLSI Technology, 100-101, 2007
145 2007 A low power phase change memory using thermally confined TaN/TiN bottom electrode JY Wu, M Breitwisch, S Kim, TH Hsu, R Cheek, PY Du, J Li, EK Lai, Y Zhu, ...
2011 International Electron Devices Meeting, 3.2. 1-3.2. 4, 2011
58 2011 Understanding amorphous states of phase-change memory using Frenkel-Poole model YH Shih, MH Lee, M Breitwisch, R Cheek, JY Wu, B Rajendran, Y Zhu, ...
2009 IEEE International Electron Devices Meeting (IEDM), 1-4, 2009
46 2009 Endurance and scaling trends of novel access-devices for multi-layer crosspoint-memory based on mixed-ionic-electronic-conduction (MIEC) materials RS Shenoy, K Gopalakrishnan, B Jackson, K Virwani, GW Burr, ...
2011 Symposium on VLSI Technology-Digest of Technical Papers, 94-95, 2011
41 2011 On the dynamic resistance and reliability of phase change memory B Rajendran, MH Lee, M Breitwisch, GW Burr, YH Shih, R Cheek, ...
2008 Symposium on VLSI Technology, 96-97, 2008
34 2008 Mechanisms of retention loss in Ge2 Sb2 Te5 -based Phase-Change Memory YH Shih, JY Wu, B Rajendran, MH Lee, R Cheek, M Lamorey, ...
2008 IEEE International Electron Devices Meeting, 1-4, 2008
31 2008 Dynamic resistance—A metric for variability characterization of phase-change memory B Rajendran, M Breitwisch, MH Lee, GW Burr, YH Shih, R Cheek, ...
IEEE electron device letters 30 (2), 126-129, 2008
30 2008 Characterizing the effects of etch-induced material modification on the crystallization properties of nitrogen doped Ge2Sb2Te5 JS Washington, EA Joseph, S Raoux, JL Jordan-Sweet, D Miller, ...
Journal of Applied Physics 109 (3), 2011
25 2011 A method to maintain phase-change memory pre-coding data retention after high temperature solder bonding process in embedded systems HL Lung, M Breitwisch, JY Wu, PY Du, Y Zhu, MH Lee, YH Shih, EK Lai, ...
2011 Symposium on VLSI Technology-Digest of Technical Papers, 98-99, 2011
15 2011 Patterning of N:Ge2 Sb2 Te5 Films and the Characterization of Etch Induced Modification for Non-Volatile Phase Change Memory Applications EA Joseph, TD Happ, SH Chen, S Raoux, CF Chen, M Breitwisch, ...
2008 International Symposium on VLSI Technology, Systems and Applications …, 2008
15 2008 Micromachined scintillation devices with charge conversion nanoparticles for neutron and beta particle detection R Dasaka, S Pellegrin, M Kamavaram, C Wilson
Proceeding-MicroTas 1, 472-475, 2005
10 2005 High selectivity nitride removal process based on selective polymer deposition RK Dasaka, SU Engelmann, NCM Fuller, M Nakamura, RS Wise
US Patent 9,627,533, 2017
9 2017 Phase-Change Memory Devices Operative at 100 KF Kao, YC Chu, FT Chen, MJ Tsai, TS Chin
IEEE Electron Device Letters 31 (8), 872-874, 2010
8 2010 Integrated metrology's role in Gas Cluster Ion Beam etch T Kagalwala, R Dasaka, M Aquilino, L Economikos, A Cepler, C Kang, ...
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2015
7 2015 A new etch planarization technology to correct non-uniformity post chemical mechanical polishing M Shen, B Zhou, Y Zhou, J Hoang, J Bowers, AD Bailey, E Pape, H Singh, ...
IEEE Transactions on Semiconductor Manufacturing 28 (4), 502-507, 2015
4 2015 IEEE Inter. Electron Devices Meet JY Wu, M Breitwisch, S Kim, TH Hsu, R Cheek, PY Du, J Li, EK Lai, Y Zhu, ...
Tech. Dig 3, 1-3.2, 2011
4 2011 Etch planarization-A new approach to correct non-uniformity post chemical mechanical polishing M Shen, B Zhou, Y Zhou, J Hoang, J Bowers, A Bailey, E Pape, H Singh, ...
25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014 …, 2014
2 2014 Influence of bottom contact material on the selective chemical vapor deposition of crystalline GeSbTe alloys A Schrott, CF Chen, MJ Breitwisch, EA Joseph, RK Dasaka, RW Cheek, ...
MRS Online Proceedings Library (OPL) 1251, 1251-H06-10, 2010
2 2010 The influence of nitrogen doping on the chemical and local bonding environment of amorphous and crystalline Ge2Sb2Te5 J Washington, EA Joseph, MA Paesler, G Lucovsky, JL Jordan-Sweet, ...
MRS Online Proceedings Library (OPL) 1160, 1160-H13-08, 2009
2 2009