| Increased efficiency of short-pulse laser-generated proton beams from novel flat-top cone targets KA Flippo, E d’Humières, SA Gaillard, J Rassuchine, DC Gautier, ... Physics of Plasmas 15 (5), 2008 | 92 | 2008 |
| Model building and analysis engine for combined X-ray and optical metrology MS Bakeman, AV Shchegrov, Q Zhao, Z Tan US Patent 10,013,518, 2018 | 83 | 2018 |
| Metrology tool with combined X-ray and optical scatterometers MS Bakeman, AV Shchegrov US Patent 10,801,975, 2020 | 68 | 2020 |
| Scatterometry-based imaging and critical dimension metrology A Sezginer, J Hench, MS Bakeman US Patent 9,494,535, 2016 | 61 | 2016 |
| Small-angle scattering X-ray metrology systems and methods MS Bakeman, AV Shchegrov, A Levy, GV Zhuang, JJ Hench US Patent 9,846,132, 2017 | 53 | 2017 |
| Methods and apparatus for measuring semiconductor device overlay using X-ray metrology A Veldman, MS Bakeman, AV Shchegrov, WD Mieher US Patent 9,885,962, 2018 | 50 | 2018 |
| Isochoric heating in heterogeneous solid targets with ultrashort laser pulses Y Sentoku, AJ Kemp, R Presura, MS Bakeman, TE Cowan Physics of plasmas 14 (12), 2007 | 47 | 2007 |
| Emittance growth mechanisms for laser-accelerated proton beams AJ Kemp, J Fuchs, Y Sentoku, V Sotnikov, M Bakeman, P Antici, ... Physical Review E 75 (5), 056401, 2007 | 44 | 2007 |
| Measurement system optimization for X-ray based metrology JJ Hench, AV Shchegrov, MS Bakeman US Patent 10,324,050, 2019 | 41 | 2019 |
| Metrology tool with combined XRF and SAXS capabilities MS Bakeman, AV Shchegrov, K Peterlinz, TG Dziura US Patent 9,778,213, 2017 | 36 | 2017 |
| Optical metrology using targets with field enhancement elements JM Madsen, AV Shchegrov, M Bakeman, TG Dziura, A Kuznetsov, ... US Patent 8,879,073, 2014 | 31 | 2014 |
| Computationally efficient X-ray based overlay measurement J Hench, AV Shchegrov, MS Bakeman US Patent 10,545,104, 2020 | 26 | 2020 |
| Free-electron laser driven by the LBNL laser-plasma accelerator CB Schroeder | 25 | 2009 |
| Combined x-ray and optical metrology KA Peterlinz, AV Shchegrov, MS Bakeman, TG Dziura US Patent 9,535,018, 2017 | 24 | 2017 |
| A large-format gated X-ray framing camera JA Oertel, T Archuleta, MS Bakeman, P Sanchez, G Sandoval, L Schrank, ... Fourth-Generation X-Ray Sources and Ultrafast X-Ray Detectors 5194, 214-222, 2004 | 14 | 2004 |
| Isochoric heating of hot dense matter by magnetization of fast electrons produced by ultra-intense short pulse irradiation Y Sentoku, A Kemp, M Bakeman, R Presura, TE Cowan Journal de Physique IV (Proceedings) 133, 521-523, 2006 | 13 | 2006 |
| Megagauss magnetic fields for magnetized laser-plasma experiments R Presura, C Plechaty, D Martinez, MS Bakeman, PJ Laca, C Haefner, ... IEEE transactions on plasma science 36 (1), 17-21, 2008 | 12 | 2008 |
| Magnetic Characterization and Design of an Undulator‐Based Electron Beam Diagnostic MS Bakeman, CB Schroeder, KE Robinson, C Toth, K Nakamura, ... AIP Conference Proceedings 1086 (1), 643-648, 2009 | 9 | 2009 |
| High brightness liquid droplet X-ray source for semiconductor metrology GV Zhuang, MS Bakeman, AV Shchegrov, JM Madsen US Patent 9,693,439, 2017 | 7 | 2017 |
| Transport and Non‐Invasive Position Detection of Electron Beams from Laser‐Plasma Accelerators J Osterhoff, T Sokollik, K Nakamura, M Bakeman, R Weingartner, ... AIP Conference Proceedings 1299 (1), 575-579, 2010 | 7 | 2010 |
